Thermoplastic Elastomer Series

You are here:  Home O-Ring KATON® Seals Fluoroelastomer Thermoplastic Elastomer Series

fluoroelastomer

MAXMOLD® TPF Series-PF92T is fluoroelastomer (thermoplastic fluoroelastomer) design for high performance applications where both purity and chemical resistance are required, mainly for semiconductor manufacturing applications.

MAXMOLD® TPF Series-PF92T para-bridging structure filler: it reinforces the materials without the use of conventional contaminating fillers, such as carbon black or minerals. Minerals fillers such as BaSO4, TiO2, SiO2, aluminum oxide and aluminum silicate exhibit high plasma resistance: therefore they can shield the polymer, but may contaminate the chamber by leaving discrete particles as soon as the polymer is etched by plasma. On the other hand, thermoplastic and fluoroelastomer have similar etching rates, so that polymeric filled compounds can be completely etched to form volatiles, significantly reducing the potential for particle generation.

The main properties of MAXMOLD® TPF Series-PF92T are as follows:

l High purity (low amount of extractable)

l Very good oxygen and fluorine plasma resistance

l Very low particle generation

l Low out gassing

l Low friction

l High abrasion resistance

l Low modulus

l Excellent mechanical and sealing properties.

They are suitable for applications at temperatures ranging from -10°C~270°C. Their extreme cleanliness along with their good plasma and chemical resistance make MAXMOLD® TPF Series-PF92T is the most suitable sealing materials for most dry (plasma etching, PECVD, LPCVD, metal CVD, PVD, ALD, plasma cleans) and wet semiconductor processes (wafer cleaning, polymer removal, wet etching, polishing).

MAXMOLD® TPF Series-PF92T can be combined with the cure system and other typical fluoroelastomer compounding ingredients; their mixing can be accomplished with two-roll mills or internal mixers. Finished goods may be produced by a variety of rubber processing methods. If only liquid peroxide is added to the polymers during the compounding stage, translucent items are produced.

The primary use for MAXMOLD® TPF Series-PF92T is the manufacturing of any kind of elastomeric sealing element such as chamber seals, lid seals, window seals, gas inlet seals, fitting seals, slit valve gates, lip seals, wafer handling parts, etc. used in the semiconductor industry.

The properties (color and physical properties) of a translucent MAXMOLD® TPF Series-PF92T compound were studied as a function of the post curing cycle, performed in an air circulating oven with reduced number of air changes (7 to 14 complete air changes per hour).

The colour is measured as white and yellow index following the ASTM E313 norm. A brownish color is usually developed at higher temperatures, because of the impurities and of the decomposition products of 2,5 bis (t-butyl peroxy) 2,5 dimethylhexane initiaOLD® TPF Series-PF92T

TOTAL METAL CONTENT

The raw gum and 3 translucent #214 O-rings (moulded, post cured, finished, and washed in ISO 7 clean room) were submitted to the digestion by dry ash test with the following results, expressed as actual metal content:

Raw gum

Finished O-rings

Al

ppm*

0.070

0.400

Ba

ppm*

0.005

0.008

Ca

ppm*

1.7

3.7

Cd

ppm*

0.001

0.0014

Co

ppm*

< 0.002

0.0094

Cr

ppm*

0.02

0.23

Cu

ppm*

< 0.02

0.022

Fe

ppm*

1.0

0.8

K

ppm*

0.09

0.23

Li

ppm*

< 0.001

< 0.001

Mg

ppm*

0.05

0.30

Mn

ppm*

0.014

0.015

Mo

ppm*

< 0.0001

< 0.001

Na

ppm*

0.25

0.27

Ni

ppm*

0.04

0.06

Pb

ppm*

0.007

0.008

Ti

ppm*

0.002

0.01

Zn

ppm*

0.29

1.3

Total

ppm*

3.6

7.3

*ppm stands for mg of metal content per kg of polymer

EXTRACTABLES

Samples

MAXMOLD® TPF Series-PF92T

Test Fluid

Ultrapure Water

Piranha Fluid
(H2SO4 96% /
H2O2 30%, 5:1)

HF 49%

Test Conditions

1 month @ 80°C

1 month @ 80°C

1 week @ 23°C

Cations

Al

ppb*

35

135

165

B

ppb*

1.4

< 10

< 2

Ba

ppb*

0.8

< 2

< 2

Ca

ppb*

95

80

70

Cr

ppb*

0.2

13.5

< 30

Cu

ppb*

0.8

1.4

< 10

Fe

ppb*

16

150

150

K

ppb*

16

28

50

Li

ppb*

0.09

0.09

0.15

Mg

ppb*

17

55

50

Mn

ppb*

0.6

1.9

< 2

Na

ppb*

16

17

< 20

Ni

ppb*

2.3

6.0

< 15

Pb

ppb*

0.2

< 2

< 1

Sr

ppb*

0.19

< 5

< 1

Zn

ppb*

16

< 50

< 25

Total

ppb*

216

488

485

*ppb stands for µg of extractable per kg of polymer

Polymer

PF92T

Inorganic acids

A

Organic acids

A

Alkalis

B

Amines (RT)

D

Hot amines (>70°C)

D

Water / Steam

A

Ketones

D

Esters

B

Ethers

A

Aldehydes

A

Alcohols

A

Hydrocarbons

A

Sour gas

A

Lubricants

A

Fluorinated fluids

A

A: < 10% volume swell; B: 10-30% volume swell; C: 30-50% volume swell; D: > 50% volumes swell

Grade

(104 1/K)

PF92T

4.2

 

General

Material Status

Commercial: can be used

Availability

Europe

North America

Taiwan

Features

Base Resistant
Crosslinkable
Good Flow

Good Process-ability
Good Chemical Resistance
Good Mold Release

Oil Resistant
Steam Resistant
Medium Viscosity

Uses

Belt / Belt Repair
Blending
Gaskets

Hose
Profiles
Seals

Sheet
Valves / Valve Parts

Color

Adjustable

Form

Adjustable

Size

AS-568A
V Series

P Series
S Series

G Series
Customized

Physical Properties

Typical Value Unit

Test Method

Temperature

-10°C~270°C

ASTM D573

Fluorine Contained

65%

No Standard

Notes
Typical properties: these are not to be construed as specifications.
Raw polymer

To our knowledge, the information contained herein is accurate as of the date of this document. However, neither Maxmold Polymer nor any of its affiliates makes any warranty, express or implied, or accepts any liability in connection with this information or its use. This information is for use by technically skilled person at their own discretion and risk and does not relate to the use of this product in combination with any other substance or any other process.

This is not a license under any information or material for any contemplated use, the manner of use and whether any patents are infringed. This information gives typical properties only and is not to be used for specification purposes. Trademarks and/or other Maxmold Polymer products referenced herein are either trademarks or registered trademarks of Maxmold Polymer or its affiliates.

Copyrights 2017 Maxmold Polymer. All Rights Reserved.