Transparent Perfluoroelastomer Series

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fluoroelastomer

MAXMOLD® PF90V is peroxide curable fluoroelastomer (FKM) designed for high performance semiconductor manufacturing applications where both high purity and low particle generation are required.

MAXMOLD® PF90V contains nano particles of PTFE which acts as organic filler: it reinforces the material without the use of conventional contaminating fillers, such as carbon black or minerals. Minerals fillers such as BaSO4, TiO2, SiO2, aluminum oxide and aluminum silicate exhibit high plasma resistance: they can therefore shield the polymer, but may contaminate the chamber by leaving discrete particles as soon as the polymer is etched by plasma. On the other hand, PTFE and FKMs have similar etching rates, so that polymeric filled compounds can be completely etched to form volatiles, significantly reducing the potential for particle generation.

l High purity (low amount of extractable)

l Good oxygen plasma resistance

l Very low particle generation

l Low out gassing

l Low permeability

l Low friction

l High abrasion resistance

l Low modulus

l Excellent mechanical and sealing properties

MAXMOLD® PF90V is a cost effective sealing material for applications at temperatures ranging from -10°C to 200°C; it was specifically developed for use in lower temperature and less chemically aggressive semiconductor processes, such as etch and physical vapor deposition (PVD), where lower particle generation is required. It is ideal as well for vacuum applications. Its chemical resistance to mineral acid, dilute alkaline solutions, steam, aliphatic and aromatic solvents makes it suitable to Chemical Mechanical Polishing / Planarization (CMP) and wet etch (acid based) processes.

MAXMOLD® PF90V can be combined with the cure system and other typical fluoroelastomer compounding ingredients; its mixing can be accomplished with two roll mills or internal mixers. Finished goods may be produced by a variety of rubber processing methods.

If only liquid curatives (peroxide and co-agent) are added to the polymers during the compounding stage, translucent items are produced.

The primary use for MAXMOLD® PF90V is the manufacturing of any kind of elastomeric sealing element such as chamber seals, lid seals, window seals, gas inlet seals, fitting seals, slit valve gates, lip seals, wafer handling parts, CMP wafer handling parts, etc used in the semiconductor and flat panel display manufacturing industry.

Basic characteristics of the raw polymers are as follows:

Properties

MAXMOLD® PF90V

ML (1+10’) @121°C (MU)

98

Fluorine content*

70

Specific gravity

1.98

*referred to the elastomer matrix

HANDLING AND SAFETY

Normal care and precautions should be taken to avoid skin contact, eye contact and breathing of fumes. Smoking is prohibited in working areas. Wash hands before eating or smoking. For complete health and safety information, please refer to the material safety data sheet.

FLUID RESISTANCE OVERVIEW

Polymer

MAXMOLD® PF90V

Inorganic acids

A

Organic acids

B

Alkalis

A

Amines (RT)

D

Hot amines (>70°C)

D

Water / Steam

A

Ketones

D

Esters

D

Ethers

D

Aldehydes

D

Alcohols

A

Hydrocarbons

A

Sour gas

A

Lubricants

A

Fluorinated fluids

C

 

General

Material Status

Commercial: can be used

Availability

Europe

North America

Taiwan

Features

Base Resistant

Crosslinkable

Good Flow

Good Process-ability

Good Chemical Resistance

Good Mold Release

Oil Resistant

Steam Resistant

Medium Viscosity

Uses

Belt / Belt Repair

Blending

Gaskets

Hose

Profiles

Seals

Sheet

Valves / Valve Parts

Color

White or Black

Form

Adjustable

Size

AS-568A

V Series

P Series

S Series

G Series

Customized

Physical Properties

Typical Value Unit

Test Method

Temperature

-15°C~250°C

ASTM D573

Fluorine Contained

65%

No Standard

 

To our knowledge, the information contained herein is accurate as of the date of this document. However, neither Maxmold Polymer nor any of its affiliates makes any warranty, express or implied, or accepts any liability in connection with this information or its use. This information is for use by technically skilled person at their own discretion and risk and does not relate to the use of this product in combination with any other substance or any other process.

This is not a license under any information or material for any contemplated use, the manner of use and whether any patents are infringed. This information gives typical properties only and is not to be used for specification purposes. Trademarks and/or other Maxmold Polymer products referenced herein are either trademarks or registered trademarks of Maxmold Polymer or its affiliates.

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