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TPF O-RING
Description：
Maxmold TPF O-Rings are advanced plasma-resistant filler developed for high-purity fluoroelastomer compounds used in semiconductor manufacturing. Unlike traditional fillers such as carbon black or mineral additives (e.g., BaSO₄, TiO₂, SiO₂), TPF reinforces the base material without generating contaminating particles. It enables the production of low-outgassing, particle-free sealing components suitable for critical cleanroom environments.
No Conventional Fillers: Eliminates use of minerals that can leave discrete particles when etched by plasma.
Fully Etchable Composition: Uses polymeric fillers with etching rates similar to the base fluoroelastomer, minimizing particle generation during plasma exposure.
Excellent Plasma Resistance: Withstands oxygen and fluorine plasma, ideal for dry etch and CVD processes.
High Purity & Cleanliness: Low extractables, minimal outgassing, and extremely low particle shedding.
Application Range
PF92T is ideal for semiconductor sealing applications across a wide temperature range of –10°C to 230°C. It is suitable for both dry and wet processes, including:
- Plasma Etching, PECVD, LPCVD, Metal CVD, PVD, ALD
- Wafer Cleaning, Polymer Removal, Wet Etching, CMP
Common applications
Maxmold TPF O-Rings are used in the production of precision sealing components such as:
- Chamber seals
- Lid and window seals
- Gas inlet seals
- Slit valve gates
- Lip seals
- Wafer handling components
Material Properties
- High purity, low extractables
- Excellent oxygen and fluorine plasma resistance
- Very low particle and outgassing levels
- High abrasion resistance and low friction
- Low modulus with strong mechanical and sealing properties
| Cost Performance Ratio | ||||||
| FK1 | FK2 | FK3 | FK5 | FVQM | FEPM | FFKM |
| ★ (Low Price) |
★★ (General Price) |
★★★★ (High Cost) |
★★★ (Median Price) |
★★★★ (High Cost) |
★★★★ (High Cost) |
★★★★★ (Very High Cost) |
| Model Table | |||||
| Model | Color | Shore A | Material | Cross-Linking | Remarks |
| TPF | Translucent Off-White | 70 & 75 | TPF | Peroxide | Anti-ozone plasma, no wheel marks |